Metal manufacturing
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Metal manufacturing
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The preparation technology methods of sputtering targets can be divided into two categories according to the production process: fusion casting method and powder metallurgy method. During the target preparation process, in addition to strictly controlling the purity, density, grain size and crystal orientation of the material, the heat treatment process conditions and subsequent molding processes also need to be strictly controlled to ensure the quality of the target.
The melt casting method is to smelt alloy raw materials with a certain composition ratio, then pour the alloy melt into a mold to form an ingot, and finally machine it into a target. The casting method is smelting and casting in vacuum. Commonly used melting methods include vacuum induction melting, vacuum arc melting and vacuum electron bombardment melting. Its advantages are low target impurity content (especially gas impurity content), high density, and the ability to be enlarged. Its disadvantages are that it requires subsequent processing and heat treatment processes to reduce its porosity, and it is suitable for multiple metal alloys with large differences in melting points and densities. Target materials, refractory metal targets, inorganic non-metallic targets, composite metal targets, it is difficult to obtain alloy targets with uniform composition by ordinary smelting methods.
The powder metallurgy method is to smelt alloy raw materials with a certain composition ratio, pour them into ingots and then crush them. The powder formed by the crushing is isostatically pressed and then sintered at high temperature to finally form a target. Commonly used powder metallurgy processes include cold pressing, vacuum hot pressing and hot isostatic pressing. The advantages of the powder metallurgy method are uniform target composition, saving of raw materials, and high production efficiency; the disadvantages are low density and high impurity content. When preparing targets by powder metallurgy, the key is to: (1) select high-purity, ultra-fine powder as raw materials; (2) select forming and sintering technology that can achieve rapid densification to ensure the low porosity of the target and control Grain size; (3) The introduction of impurity elements is strictly controlled during the preparation process.
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